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Category:Video games developed in RussiaThe invention relates to a method of etching a semiconductor substrate using a chemically reactive plasma to form semiconductor devices, and an apparatus for carrying out the method.
Typically, formation of semiconductor devices such as integrated circuit devices are formed by placing a semiconductor substrate such as a silicon substrate in a processing chamber, and introducing gases which react in the chamber to produce desired semiconductor devices. In the processing chamber, reactive gases and electric fields cause a chemical reaction in the surface of the silicon substrate to produce a thin layer of material, or "film", on the surface of the substrate. Typical films include silicon dioxide, polysilicon, silicon nitride, or silicon oxynitride. The film, in the presence of a positive voltage, will etch the silicon substrate. In some applications, it may be desirable to remove the film in portions other than the desired location on the surface of the substrate. This may be done by etching from the backside of the silicon substrate using the film as an etch mask. The film may also be used to mask a portion of the silicon substrate from etching, or for protection against further etching.
Etching with the film presents unique problems. The silicon substrate and the film are typically formed of different materials. When the substrate and the film are brought into contact, the two materials rub against one another and inevitably damage one of the films. This damage becomes evident as pits in the surface of the film, usually after a prolonged exposure. Alternatively, in the absence of a positive voltage applied to the film, the silicon substrate and the film are electrostatically attracted to one another, and will tend to roll up into a cylindrical shape. When the rollup occurs, the film is often torn from the substrate.
In addition, the ability of the film to withstand etching is low. The film will etch under the influence of a positive voltage applied to it, but will dissolve in the absence of a voltage applied to it. In addition, the film is typically much thinner than the substrate.
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